Technics Hummer V Sputter Coater: Difference between revisions

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==Documentation==
==Documentation==
Manual scans for the sputter coater are available, as is a manual for a similar but not identical model of the carbon arc deposition system. A location to drop them is needed.
Manual scans for the sputter coater are available, as is a manual for a similar but not identical model of the carbon arc deposition system. A location to drop them is needed. The m

The manufacturer was purchased by [http://www.anatechusa.com Anatech USA] and they still support this product.


==Maintenance Log==
==Maintenance Log==

Revision as of 16:51, 10 July 2013


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Configuration

  • Standard sputter coater
  • Carbon arc attachment for carbon deposition

Status

  • Requires argon for operation. Preferably high purity argon.
  • Power cord is scary and needs to be replaced.
  • Gas flow rate meter has a small leak, needs a new gasket.
  • Changing the vacuum oil would be a good idea.
  • Initial tests with welding argon showed that it worked and was sputtering metal, however maintaining a plasma seemed to use a lot of current. The former operator suggested pulsing it to burn any oxygen in the chamber out. The manufacturer suggested a short that could be remedied by a good cleaning, which was performed.

List of Currently Certified Users

Qualified Member Trained By
Ryan Pierce Ryan Pierce
Steve Finkelman Steve Finkelman

Documentation

Manual scans for the sputter coater are available, as is a manual for a similar but not identical model of the carbon arc deposition system. A location to drop them is needed. The m

The manufacturer was purchased by Anatech USA and they still support this product.

Maintenance Log

Date Maintainer Description
4/?/2013 Steve Finkelman Full cleaning of chamber.
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