Technics Hummer V Sputter Coater

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Configuration

  • Sputter coater with Au/Pd target
  • Carbon arc attachment for carbon deposition

Status

  • The sputter coater was donated along with all related equipment for the SEM to a science based makerspace The Analytics Lounge, NFP.
  • Their website is http://www.analyticslounge.org/

List of Currently Certified Users

Qualified Member Trained By
Ryan Pierce Ryan Pierce

Documentation

Manual scans for the sputter coater are available, as is a manual for a similar but not identical model of the carbon arc deposition system. A location to drop them is needed.

The manufacturer was purchased by Anatech USA and they still support this product.

Maintenance Log

Date Maintainer Description
11/24/2013 Ryan Pierce and Fitterdave Removed flow gauge from argon regulator. It was leaking, and we suspect this was because it was designed to handle far lower pressures than even the 5 PSI currently I had been using.
11/9/2013 Ryan Pierce Replaced oil with high vacuum oil that came with the SEM. Note that Fitterdave changed out a gasket on the argon flow meter, but it still has a leak as tested by Ryan. Also put panels back on.
1?/?/2013 Ryan Pierce Replaced HV power supply with one shipped from the manufacturer as a former refurb. New power supply works. A plasma can be maintained by adjusting gas pressure. It is definitely sputter coating. Also replaced power cord. (Note: it uses a standard extension cord. Borrowed one but it is a bit long.)
7/21/2013 Ryan Pierce Tried using this after cleaning. Vacuum could only get down to 30-40 millitorr. The power supply seemed to need excessive amperage just to maintain a plasma, and that was with low voltage. Then something inside the power supply exploded with a burning smell.
4/?/2013 Steve Finkelman Full cleaning of chamber.
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